DLC coated silicon Wafer

Applications

DLC coated silicon Wafer

Ultra precise surface uniformity and smoothness control

100 mm diameter; 150 mm diameter; 200mm diameter silicon wafer

SSP, doping: N or P-type

Thickness: 275-700 microns

500nm-5 um Polycrystalline diamond-like carbon (DLC) coating (a –C:H or ta-C)

Coating thickness uniformity: <5%

Surface roughness <10nm